Gartner Research

Market Insight: The Delay of EUV Drives Higher-Cost Semiconductor Scenarios

Published: 13 May 2013

ID: G00251891

Analyst(s): Dean Freeman


The delay of extreme ultraviolet lithography will drive significantly higher lithography costs. Alternative technologies have the potential to minimize the higher costs, but they are still several years away.

Table Of Contents


Background and Context

  • Moore's Law Will Fail
  • 193i
  • DSA
  • E-Beam
  • EUV

The Impact

  • 193i Multiple Patterning
  • DSA
  • E-Beam
  • EUV


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