Gartner Research

Integrated Metrology: The Devil's in the Details

Published: 01 October 2001

ID: G00100839

Analyst(s): Bob Johnson


Integrated metrology promises critical yield improvements for larger wafers and smaller geometries, but its implementation faces significant obstacles. How will the industry adapt?

Table Of Contents
  • Executive Summary
    • Introduction
    • Conclusions and Recommendations
  • Integrated Metrology
    • Integrated vs. In Situ Metrology
    • Integrated Metrology Tools
    • Applications
  • Economics and Payback
  • Integration Issues
    • Complexity
    • Project Management
  • Risks, Trade-Offs, Challenges
    • Marketing Challenges
  • Gartner Dataquest Perspective
    • Predictions and Recommendations

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